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Thin Film Shape Memory Alloys

Details

  • 106 b/w illus. 14 tables
  • Page extent: 486 pages
  • Size: 247 x 174 mm
  • Weight: 1.11 kg

Hardback

 (ISBN-13: 9780521885768)

This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.

• The first book dedicated to this exciting and rapidly growing field, written by leading experts • A complete introduction of the topic that enables readers to understand and prepare their own high-quality, high-performance, TiNi SMAs • Focuses on the latest technologies and applications in MEMS and biological devices, providing up-to-date, practical information

Contents

Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang; Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang; 2. Martensitic transformation S. Miyazaki; 3. Deposition techniques for TiNi films A. D. Johnson; 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki; 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee; 6. Mechanical properties A. Ishida; 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang; 8. Ion irradiation T. LaGrange and R. Gotthardt; 9. Laser post annealing and theory W. M. Huang and M. H. Hong; Part III. Applications: 10. Overview of applications A. D. Johnson; 11. Theory on shape memory microactuator Y. C. Shu; 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim; 13. Microactuator applications K. P. Mohanchandra and G. Carman; 14. Microvalves M. Kohl; 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt; 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki; 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang; 18. Shape memory thin film composite microactuators E. Quandt; 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.

Contributors

S. Miyazaki, Y. Q. Fu, W. M. Huang, A. D. Johnson, H. Cho, A. G. Ramirez, X. Huang, H. J. Lee, A. Ishida, M. D. Cai, S. Zhang, T. LaGrange, R. Gotthardt, M. H. Hong, Y. C. Shu, M. Tomozawa, H. Y. Kim, K. P. Mohanchandra, G. Carman, M. Kohl, C. Zamponi, R. L. De Miranda, E. Quandt, J. Buenconsejo, H. Y. Kim, J. Luo, S. E. Ong, C. Y. Chung

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