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X-ray Diffraction Analysis of SiGe/Si Superlattices

Published online by Cambridge University Press:  06 March 2019

M. Fatemi ,
S. Prokes ,
B. V. Shanabrook  and
K. L. Wang
M. Fatemi
Affiliation:
U.S. Naval Research Laboratory Washington, DC 20375-5000
S. Prokes
Affiliation:
U.S. Naval Research Laboratory Washington, DC 20375-5000
B. V. Shanabrook
Affiliation:
U.S. Naval Research Laboratory Washington, DC 20375-5000
K. L. Wang
Affiliation:
University of California at Los Angeles Los Angeles, CA 90024
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Extract

It is well known that x-ray diffraction techniques provide one of the most direct means of analyzing superlattice periodicity, layer thickness, strain, and defect structure. This suitability of x-rays is a consequence of the fact that most superlattice periods are in the range of 10 to 50 times the typical wavelength (Cuκα=1.54 Å) and are hence measurable by x-ray diffraction, and also that x-rays are non-destructive within the energy and dosage ranges needed for these studies. Applications of x-ray techniques to supperlattices have been discussed in many publications in the open literature.

Type
Research Article
Information
Advances in X-Ray Analysis , Volume 33: Thirty-Eighth Annual Conference on Applications of X-ray Analysis, July 31 - August 4, 1989 , 1989 , pp. 75 - 82
Copyright
Copyright © International Centre for Diffraction Data 1989

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