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Raman microprobe studies of laser induced damage in dielectric films

Published online by Cambridge University Press:  31 January 2011

P.L. White ,
G.J. Exarhos ,
M. Bowden ,
N.M. Dixon  and
D.J. Gardiner
P.L. White*
Affiliation:
Pacific Northwest Laboratory, P.O. Box 999, Richland, Washington 99352
G.J. Exarhos*
Affiliation:
Pacific Northwest Laboratory, P.O. Box 999, Richland, Washington 99352
M. Bowden
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
N.M. Dixon
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
D.J. Gardiner
Affiliation:
Newcastle upon Tyne Polytechnic, Ellison Place, Newcastle upon Tyne, NEI 8ST, England
*
a)Current Address, Rocketdyne Division, 6633 Canoga Ave., MS FA16, Canoga Park, California 91303.
b)Author to whom correspondence should be addressed.
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Abstract

Raman microprobe studies of pulsed laser damaged TiO2 films deposited using three different methods are reported. Phase transformation and redeposition of coating materials were observed in selected regions of amorphous films deposited by ion beam sputtering and electron beam evaporation. Preferential removal of a specific phase or transformation to a second phase were observed in reactively sputtered films. Some damage sites exhibited regions of stress heterogeneity which can be explained in terms of the return electron stream model of plasma/target interaction and rapid quenching.

Type
Articles
Information
Journal of Materials Research , Volume 6 , Issue 1 , January 1991 , pp. 126 - 133
Copyright
Copyright © Materials Research Society 1991

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