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Thermal transfer printing technique for electrode patterning in cofired ceramic multi-layer devices

Published online by Cambridge University Press:  03 March 2011

Kumi Okuwada
Affiliation:
Materials and Devices Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210, Japan
Tetsuo Okuyama
Affiliation:
Materials and Devices Laboratories, Research and Development Center, Toshiba Corporation, Kawasaki 210, Japan
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Abstract

A new mask-less electrode patterning method using a thermal transfer printing technique was investigated. Thermal ink ribbons were prepared, which included more than 50 vol. % conductive metal powder. Arbitrary electrode patterns were designed with a computer and printed out on a ceramic green sheet with a serial thermal printer. The ceramic green sheets with printed electrode patterns were stacked up and cofired to obtain a multi-layer ceramic capacitor.

Type
Articles
Copyright
Copyright © Materials Research Society 1994

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References

REFERENCES

1Drumheller, C. E., Proc. Int. Symp. on Microelectronics (ISHM) 1982, pp. 449454.Google Scholar
2Isozaki, S., Sugimoto, M., Ohshima, T., Katoh, Y., Shimada, Y., and Terao, H., Proc. Int. Microelectronic Conference (IMC) 1992, pp. 488493.Google Scholar
3Akutsu, E., Soga, H., Ando, S., and Maruyama, K., Proc. Society for Imaging Science & Technology (IS & T) 1992, pp. 372375.Google Scholar
4Shrout, T. R. and Dougherty, J. P., Ceramic Transactions (The American Ceramic Society, Inc., Westerville, OH, 1990), Vol. 8, p. 3.Google Scholar
5Furukawa, O., Harata, M., Yamashita, Y., Inagaki, K., and Mukaeda, S., Jpn. J. Appl. Phys. 26, 3437 (1987), Supplement 26-2.Google Scholar