Hostname: page-component-848d4c4894-x5gtn Total loading time: 0 Render date: 2024-06-12T09:01:25.838Z Has data issue: false hasContentIssue false
  • English
  • Français

Low and high repetition frequency femtosecond lasers processing of tungsten-based thin film

Published online by Cambridge University Press:  22 October 2014

B. Gaković ,
S. Petrović ,
A. Krmpot ,
D. Pantelić ,
B. Jelenković ,
E. Stratakis  and
C. Fotakis
B. Gaković*
Affiliation:
Institute of Nuclear Science Vinča, University of Belgrade, Belgrade, Serbia
S. Petrović
Affiliation:
Institute of Nuclear Science Vinča, University of Belgrade, Belgrade, Serbia
A. Krmpot
Affiliation:
Institute of Physics Belgrade, University of Belgrade, Belgrade, Serbia
D. Pantelić
Affiliation:
Institute of Physics Belgrade, University of Belgrade, Belgrade, Serbia
B. Jelenković
Affiliation:
Institute of Physics Belgrade, University of Belgrade, Belgrade, Serbia
E. Stratakis
Affiliation:
Institute of Electronic Structure and Laser, Foundation for Research and Technology–Hellas, Heraklion, Greece Department of Materials Science and Technology, University of Crete, Crete, Greece
C. Fotakis
Affiliation:
Institute of Electronic Structure and Laser, Foundation for Research and Technology–Hellas, Heraklion, Greece Department of Physics, University of Crete, Crete, Greece
*
Address correspondence and reprint requests to: Biljana Gakovic, Institute of Nuclear Science-Vinča, University of Belgrade, P.O. Box 522, 11001 Belgrade, Serbia. E-mail: biljagak@vinca.rs
Get access Rights & Permissions [Opens in a new window]

Abstract

In this work we reported low and high repetition frequency femtosecond laser-induced modifications of tungsten-based thin film. The tungsten-titanium (WTi) thin film, thickness of 190 nm, was deposited by sputtering on single crystal Si (100) wafer. Irradiations were performed in air by linearly polarized and focused femtosecond laser beams with following parameters: (1) pulse duration 160 fs, wavelength 800 nm, laser repetition frequency (LRF) 75 MHz — high LRF, and (2) duration 40 fs, wavelength 800 nm, LRF of 1 kHz — low LRF. The results of femtosecond lasers processing of the WTi thin film revealed laser induced periodical surface structures (LIPSS) in the case of low LRF regime. LIPSSs were formed with different periodicity and different orientation to the laser polarization at the surface: micro-scale LIPSSs with orientation perpendicular to the laser polarization and nano-scale LIPSSs parallel and perpendicular to the laser polarization. After processing of the WTi/Si system in high LRF regime ablation and nano-particles formation were registered.

Keywords

EDXFemtosecond laserLaser ablationlaser repetition frequencyLIPSSSEMSurface modificationThin films
Type
Research Article
Information
Laser and Particle Beams , Volume 32 , Issue 4 , December 2014 , pp. 613 - 619
Copyright
Copyright © Cambridge University Press 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Batani, D. (2010). Short-pulse laser ablation of materials at high intensities: Influence of plasma effects. Laser Part. Beam 28, 235–244.CrossRefGoogle Scholar
Baurle, D. (2011). Laser Processing and Chemistry. Berlin: Springer Verlag.Google Scholar
Bhagat, S., Han, H. & Alford, T.L. (2006). Tungsten-titanium diffusion barriers for silver metallization. Thin Solid Films 515, 1998–2002.Google Scholar
Bonse, J., Baudach, S., Krüger, J., Kautek, W. & Lenzner, M. (2002). Femtosecond laser ablation of silicon–modification thresholds and morphology. Appl. Phys. A 74, 19–25.Google Scholar
Bulgakova, N.M., Burakov, I.M., Meshcheryakov, Y.P., Stoian, R., Rosenfeld, A. & Hertel, I.V. (2007). Theoretical Models and Qualitative Interpretations of Fs Laser Material Processing. J. Laser Micro/Nanoeng. 2, 76–86.Google Scholar
Campbell, B.R., Palmer, J.A. & Semak, V.V. (2007). Peculiarity of metal drilling with a commercial femtosecond laser. Appl. Surf. Sci. 253, 6334–6338.CrossRefGoogle Scholar
Cheng, Jian, Chang-Sheng, Liu, ShuoShang, DunLiu, Perrie, W., Dearden, G. & Watkins, K. (2013). A review of ultrafast laser materials micromachining. Optics & Laser Tech. 46, 88–102.Google Scholar
Colombier, J.P., Garrelie, F., Faure, N., Reynaud, S., Bounhalli, M., Audouard, E., Stoian, R. & Pigeon, F. (2012). Effects of electron-phonon coupling and electron diffusion on ripples growth on ultrafast-laser-irradiated metals. J. App. Phys. 111, 024902/1–7.Google Scholar
Crawford, T.H.R. & Haugen, H.K. (2007). Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths. Appl. Surf. Sci. 253, 4970–4977.Google Scholar
Gamaly, E.G. (2011). The physics of ultra-short laser interaction with solids at non-relativistic intensities. Phys. Rep. 508, 591–243.CrossRefGoogle Scholar
Guidi, V., Boscarino, D., Comini, E., Faglia, G., Ferroni, M., Malagu, C., Martinelli, G., Rigato, V. & Sberveglieri, G. (2000). Preparation and characterization of titanium-tungsten sensors. Sensors & Actuators, B 65, 264–266.Google Scholar
Her, T.-H. (2010). Femtosecond-Laser-Induced Periodic Self-Organized Nanostructures in Comprehensive Nano-Science and Technology. New York: Elsevier, Ch. 4, 277–311.Google Scholar
Itina, T., Gourit, K., Zhigilei, L.V., Noel, S., Hermann, J. & Sentis, M. (2007). Mechanisms of small clusters production by short and ultra-short laser ablation. Appl. Surf. Sci. 253, 7656–7661.Google Scholar
Kim, J. & Na, S. (2007). Metal thin film ablation with femtosecond pulsed laser. Opt. & Laser Techn. 39, 1443–1448.Google Scholar
Mannion, P.T., Magee, J., Coyne, E., O'Connor, G.M. & Glynn, T.J. (2004). The effect of damage accumulation behaviour on ablation thresholds and damage morphology in ultrafast laser micro-machining of common metals in air. App. Surf. Sci. 233, 275–287.Google Scholar
Petrović, S., Gaković, B., Peruško, D., Trtica, M., Radak, B., Panjan, P. & Miljanić, Š. (2008). Surface modification of a WTi thin film on Si substrate by nanosecond laser pulses. Appl. Surf. Sci. 254, 4013–4017.Google Scholar
Stašić, J., Gaković, B., Krmpot, A., Pavlović, V., Trtica, M. & Jelenković, B. (2009). Nickel-based super-alloy Inconel 600 morphological modifications by high repetition rate femtosecond Ti:sapphire laser. Laser Part. Beams 27, 699–707.Google Scholar
Stratakis, E. (2012). Nanomaterials by ultrafast laser processing of surfaces. Sci. Advan. Mater. 4, 407–431.Google Scholar
Stratakis, E., Giorgi, R., Barberoglou, M., Dikonimos, T., Salernitano, E., Lisi, N. & Kymakis, E. (2010). Three-dimensional carbon nanowall field emission arrays. App. Phys. Lett. 96, 043110–043113.Google Scholar
Tan, B., Panchatsharam, S. & Venkatakrishnan, K. (2009). High repetition rate femtosecond laser forming sub-10 µm diameter interconnection VIAS. J. Phys. 42, 065102/1–9.Google Scholar
Tsibidis, G.D., Barberoglou, M., Loukakos, P.A., Stratakis, E. & Fotakis, C. (2012). Dynamics of ripple formation on silicon surfaces by ultrashort laser pulses in sub ablation conditions. Phys. Rev. B 86, 115316/1–14.Google Scholar
Varlamova, O., Costache, F., Ratzke, M. & Reif, J. (2007). Control parameters in pattern formation upon femtosecond laser ablation. Appl. Surf. Sci. 253, 7932–7936.Google Scholar
Vorobyev, A.Y. & Guo, C. (2007). Effects of nanostructure-covered femtosecond laser-induced periodic surface structures on optical absorptance of metals. Appl. Phys. A 86, 321–324.Google Scholar
Vorobyev, A.Y. & Guo, C. (2008). Femtosecond laser-induced periodic surface structure formation on tungsten. J. App. Phys. 104, 063523/1–4.Google Scholar
Yasumaru, N., Miyazaki, K. & Kiuchi, J. (2003). Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC. Appl. Phys. A 76, 983–985.Google Scholar
Zorba, V., Tzanetakis, P., Fotakis, C., Spanakis, E., Stratakis, E., Papazoglou, D.G. & Zergioti, I. (2006). Silicon electron emitters fabricated by ultraviolet laser pulses. Appl. Phys. Lett. 88, 081103/1–3.Google Scholar