Hostname: page-component-848d4c4894-75dct Total loading time: 0 Render date: 2024-06-02T01:54:07.363Z Has data issue: false hasContentIssue false
  • English
  • Français

Etching Dynamics of Geometrically Confined Silicon Nanostructure

Published online by Cambridge University Press:  22 July 2022

Kunmo Koo ,
Joon Ha Chang ,
Sanghyeon Ji ,
Jacob Choe ,
Seungmin Shin ,
Geun-Taek Lee ,
Tae-Hong Kim  and
Jong Min Yuk
Kunmo Koo
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Joon Ha Chang
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Sanghyeon Ji
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Jacob Choe
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Seungmin Shin
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Geun-Taek Lee
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Tae-Hong Kim
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Jong Min Yuk*
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
*
*Corresponding author: jongmin.yuk@kaist.ac.kr

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Beyond Visualization with In Situ and Operando TEM
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 126 - 127
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

Footnotes

†

Current affiliation: Department of Materials Science and Engineering, Northwestern University, Evanston, IL, United States.

‡

Current affiliation: Cathode Materials Research Group, Research Institute of Industrial Science and Technology (RIST), Incheon, Republic of Korea.

References

Pinion, C. W. et al. , Journal of Materials Chemistry C 4 (2016), p. 3890.CrossRefGoogle Scholar
Gosálvez, M. A., et al. , Handbook of Silicon Based MEMS and Technologies: Second Edition (2015), p. 470.CrossRefGoogle Scholar
Ross, F. M. et al. , Science 350 (2015), aaa9886.CrossRefGoogle Scholar
Aabdin, Z. et al. , Nano Letters 17 (2017), p. 2953.CrossRefGoogle Scholar