Hostname: page-component-848d4c4894-ndmmz Total loading time: 0 Render date: 2024-06-11T21:17:21.195Z Has data issue: false hasContentIssue false
  • English
  • Français

Fully Automated Data Acquisition and Reporting for Semiconductor Dopant Analysis

Published online by Cambridge University Press:  22 July 2022

Katherine P. Rice ,
Gard A. Groth  and
Ty J. Prosa
Katherine P. Rice*
Affiliation:
CAMECA Instruments Inc, Madison, WI, USA
Gard A. Groth
Affiliation:
CAMECA Instruments Inc, Madison, WI, USA
Ty J. Prosa
Affiliation:
CAMECA Instruments Inc, Madison, WI, USA
*
*Corresponding author: Katherine.rice@ametek.com

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Expanding the Limits of Atom Probe Tomography
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 726 - 727
Check for updates
Copyright
Copyright © Microscopy Society of America 2022

References

Thompson, K., Booske, J., Larson, D. J. and Kelly, T. F. Applied Physics Letters 87 (2005). doi 10.1063/1.2005368Google Scholar
Thompson, K., Flaitz, P. L., Ronsheim, P., Larson, D. J. and Kelly, T. F. Science 317 (2007). doi: 10.1126/science.1145428CrossRefGoogle Scholar
Blavette, D., Cadel, E., Cojocaru-Miredin, O. and Deconihout, B. Conference Series Materials Science and Engineering 7 (2011)., 012004-1–10. doi: 101088/1757-899X/7/1/012004Google Scholar