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Large-Aperture STEM Hexapole Cs-Corrector

Published online by Cambridge University Press:  22 July 2022

S. Uhlemann ,
T. Riedel ,
P. Hartel ,
S. Perl ,
M. Linck ,
V. Gerheim  and
H. Müller
S. Uhlemann*
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
T. Riedel
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
P. Hartel
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
S. Perl
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
M. Linck
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
V. Gerheim
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
H. Müller
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126 Heidelberg, Germany
*
*Corresponding author: uhlemann@ceos-gmbh.de

Abstract

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Type
Advanced Imaging and Spectroscopy for Nanoscale Materials
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 2630 - 2632
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Copyright
Copyright © Microscopy Society of America 2022

References

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We acknowledge and highly appreciate the collaboration and support by JEOL company.Google Scholar