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Quantitative Measurement of Electric Fields in Microelectronics Devices by In-Situ Pixelated STEM

Published online by Cambridge University Press:  22 July 2022

Victor Boureau ,
Lucas Bruas ,
Matthew Bryan ,
Jean-Luc Rouvière  and
David Cooper
Victor Boureau
Affiliation:
Interdisciplinary Center for Electron Microscopy, EPFL, Lausanne, Switzerland
Lucas Bruas
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
Matthew Bryan
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
Jean-Luc Rouvière
Affiliation:
Univ. Grenoble Alpes, CEA, IRIG-MEM, Grenoble, France
David Cooper*
Affiliation:
Univ. Grenoble Alpes, CEA, Leti, Grenoble, France
*
*Corresponding author: david.cooper@cea.fr

Abstract

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Type
Developments of 4D-STEM Imaging - Enabling New Materials Applications
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 480 - 482
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Copyright
Copyright © Microscopy Society of America 2022

References

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