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A scheme to correct for inaccuracies in the compositional analysis of SixGe1-x by Atom Probe Tomography

Published online by Cambridge University Press:  30 July 2021

Masoud Dialameh ,
Jeroen Scheerder ,
Richard J. H. Morris ,
Johan Meersschaut ,
Olivier Richard ,
Wilfried Vandervorst ,
Paul van der Heide  and
Claudia Fleischmann
Masoud Dialameh
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Johan Meersschaut
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Olivier Richard
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, United States
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001 Leuven, Belgium,Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, Belgium

Abstract

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Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 178 - 179
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Cuduvally, R., Morris, R. J. H., Ferrari, P., Bogdanowicz, J., Fleischmann, C., Melkonyan, D. & Vandervorst, W., “Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAs”, Ultramicroscopy 210, 112918 (2019)CrossRefGoogle ScholarPubMed
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