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SEM Image Observation Using an Electron Energy and Electron Take-off Angle Filtered Detector

Published online by Cambridge University Press:  27 August 2014

Takeshi Otsuka ,
Motohiro Nakamura ,
Ken-ichi Yamashita ,
Masaya Hara ,
Felix Timischl ,
Kazuhiro Honda ,
Masato Kudo  and
Shin-ichi Kitamura
Takeshi Otsuka
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Motohiro Nakamura
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Ken-ichi Yamashita
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Masaya Hara
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Felix Timischl
Affiliation:
JEOL Technics Ltd., 6-38 Musashino 2-chome, Akishima, Tokyo, 196-0021, Japan
Kazuhiro Honda
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan
Masato Kudo
Affiliation:
JEOL Technics Ltd., 6-38 Musashino 2-chome, Akishima, Tokyo, 196-0021, Japan
Shin-ichi Kitamura
Affiliation:
JEOL Ltd., 1-2 Musashino, 3-Chome, Akishima, Tokyo, 196-8558, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 36 - 37
Copyright
Copyright © Microscopy Society of America 2014 

References

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[2] Lin, Y.and Joy, David C. Surface and Interface Analysis 37 (2005) p. 895.Google Scholar
[3] Ball, M. D., McCartney, D. G. Journal of Microscopy 124 (1981) p. 57.Google Scholar
[4] Asahina, S., et al, Microscopy and Analysis, Nanotechnology supplement November (2012).Google Scholar