Hostname: page-component-848d4c4894-2pzkn Total loading time: 0 Render date: 2024-06-02T23:16:07.537Z Has data issue: false hasContentIssue false
  • English
  • Français

Stoichiometric analysis of superficial Ba doped Strontium Titanium Oxide layers using APT: the case of the missing Oxygen!

Published online by Cambridge University Press:  30 July 2021

Richard J. H. Morris ,
Mihaela Popovici ,
Johan Meersschaut ,
Jeroen Scheerder ,
Ludovic Goux ,
Gouri Kar ,
Claudia Fleischmann ,
Wilfried Vandervorst  and
Paul van der Heide
Richard J. H. Morris
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Mihaela Popovici
Affiliation:
IMEC, United States
Johan Meersschaut
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, United States
Jeroen Scheerder
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Leuven, Vlaams-Brabant, Belgium
Ludovic Goux
Affiliation:
IMEC, United States
Gouri Kar
Affiliation:
IMEC, United States
Claudia Fleischmann
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, Belgium
Wilfried Vandervorst
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, Quantum solid-state physics group, KU Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium, United States
Paul van der Heide
Affiliation:
Imec, Kapeldreef 75, 3001Leuven, Belgium, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advanced Application of Atom Probe Tomography: Specimen preparation, Instrumentation, and Data analysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2480 - 2481
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Hall, Stephen et al. , J. Telecomm and Inform Tech, 2, 33, 2007.Google Scholar
Ji, Dianxiang et al. , Nature, 570, 87, 2019.CrossRefGoogle Scholar
Kelly, Tom & Miller, Michael, Rev. Sci. Instrum, 78, 031101, 2007.CrossRefGoogle Scholar