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Methods of Maximizing X-ray Detection in SEMs

Published online by Cambridge University Press:  14 March 2018

David Rohde*
Affiliation:
Thermo Fisher Scientific, Madison, WI
Patrick Camus
Affiliation:
Thermo Fisher Scientific, Madison, WI

Extract

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Sample throughput is a significant issue in the microscopy lab. It is possible to improve the efficiency of analysis by changing the way we operate the microscope or upgrading the analytical system. One method to increase the efficiency of the analyst is to automate as many procedures as possible, including acquisitions. However, the most effective way to increase efficiency is to reduce the time that the analyst spends acquiring data. This is fine, but statistical confidence must not be reduced by the use of shorter acquisition times and the quality of the data or shape of the peaks must not be compromised as well (Figure 1, Table 1). To maintain the same level of statistical confidence of a longer analysis, an increase of the x-ray detection rate is needed.

Type
Research Article
Copyright
Copyright © Microscopy Society of America 2007