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Ferroelectric and Piezoelectric Properties of MOCVD Pb(Mg1/3Nb2/3)O3-PbTiO3 Epitaxial Thin Films

Published online by Cambridge University Press:  10 February 2011

P. K. Baumann ,
G. R. Bai ,
S. K. Streiffer ,
O. Auciello ,
K. Ghosh ,
S. Stemmer ,
A. Munkholm ,
Carol Thompson ,
D.-J. Kim  and
J.-P. Maria
...Show all authors
P. K. Baumann
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL. 60439–4838.
G. R. Bai
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL. 60439–4838.
S. K. Streiffer
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL. 60439–4838.
O. Auciello
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL. 60439–4838.
K. Ghosh
Affiliation:
Materials Science Division, Argonne National Laboratory, Argonne, IL. 60439–4838.
S. Stemmer
Affiliation:
Dept. of Mech. Eng. and Materials Science, Rice University Houston, TX 77005
A. Munkholm
Affiliation:
Chemistry Division, Argonne National Laboratory, Argonne, IL 60439
Carol Thompson
Affiliation:
Dept. of Physics, Northern Illinois University, DeKalb, IL 60115, and Materials Science Division, Argonne National Laboratory, Argonne, IL 60439
D.-J. Kim
Affiliation:
Dept. of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
J.-P. Maria
Affiliation:
Dept. of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
A. I. Kingon
Affiliation:
Dept. of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695
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Abstract

We have grown epitaxial Pb(Mg1/3Nb2/3)O3 (PMN) and (1-x)(Pb(Mg1/3Nb2/3)O3)- x(PbTiO3) (PMN-PT) thin films by metalorganic chemical vapor deposition at 700 - 780°C on (100) SrTiO3 and SrRuO3/SrTiO3 substrates. The zero-bias permittivity and loss measured at room temperature and 10 kHz for 220 nm thick pure PMN films were 900 and 1.5%, respectively. For PMN-PT films, the small-signal permittivity ranged from 1000 to 1500 depending on deposition conditions and Ti content; correspondingly low values for the zero-bias dielectric loss between 1 and 5% were determined for all specimens. For PMN-PT with x of approximately 0.30–0.35, polarization hysteresis with Pr,≈18μC/cm2 was obtained. Initial piezoresponse data are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 596: Symposium Y – Ferroelectric Thin Films VIII , 1999 , 517
Copyright
Copyright © Materials Research Society 2000

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