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Multi-color luminescence from nanocrystalline silicon

Published online by Cambridge University Press:  01 February 2011

Hiroshi Kunii ,
Keisuke Sato ,
Kenji Hirakuri  and
Tomio Izumi
Hiroshi Kunii
Affiliation:
Department of Electronic and Computer Engineering, Tokyo Denki University, Ishizaka Hatoyama, Hikigun, Saitama, 350–0394, JAPAN
Keisuke Sato
Affiliation:
Department of Electronic and Computer Engineering, Tokyo Denki University, Ishizaka Hatoyama, Hikigun, Saitama, 350–0394, JAPAN
Kenji Hirakuri
Affiliation:
Department of Electronic and Computer Engineering, Tokyo Denki University, Ishizaka Hatoyama, Hikigun, Saitama, 350–0394, JAPAN
Tomio Izumi
Affiliation:
Department of Electronics, Tokai University 1117 Kitakaname, Hiratsuka, Kanagawa, 259–1292, Japan
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Abstract

We have investigated correlation between luminescence property and particle size of nanocrystalline silicon (nc-Si) fabricated by controlling Si concentration in an amorphous SiOx (a-SiOx) films. The Si concentration in the a-SiOx film was increased with increasing a RF power and lowering a gas pressure. The increase of Si concentration led to expansion of the particle size of nc-Si. The particle size of nc-Si was varied from 1.8 nm up to 3.5 nm for the sample introduced the Si concentration from 0.7 % up to 9 %. The luminescent color from nc-Si grains, which differs in size, showed a red/green/blue lights.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 832: Symposium F – Group IV Semiconductor Nanostructures , 2004 , F10.12
Copyright
Copyright © Materials Research Society 2005

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References

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