Hostname: page-component-848d4c4894-75dct Total loading time: 0 Render date: 2024-06-01T10:42:54.101Z Has data issue: false hasContentIssue false

Complex optical filter prepared by sputter deposition

Published online by Cambridge University Press:  26 January 2010

M. H. Asghar
Affiliation:
Centre for Excellence in Solid State Physics, University of Punjab, Lahore, 54590, Pakistan
M. Shoaib*
Affiliation:
Department of Chemical & Materials Engineering, Pakistan Institute of Engineering & Applied Sciences (PIEAS), P.O. Nilore, Islamabad, 45650, Pakistan
Z. M. Khan
Affiliation:
School of Chemical & Materials Engineering, National University of Sciences & Technology, Islamabad, 45320, Pakistan
F. Placido
Affiliation:
Thin Film Center, University of the West of Scotland, High Street, Paisley, UK
S. Naseem
Affiliation:
Centre for Excellence in Solid State Physics, University of Punjab, Lahore, 54590, Pakistan
M. Mehmood
Affiliation:
Department of Chemical & Materials Engineering, Pakistan Institute of Engineering & Applied Sciences (PIEAS), P.O. Nilore, Islamabad, 45650, Pakistan
Get access

Abstract

An infrared heat reflecting multilayer thin film filter comprising alternate layers of ZrO2 and SiO2 has been modeled and prepared on a BK7 glass substrate using RF-magnetron sputtering. Initially, the individual films of the used materials have been characterized by X-ray diffraction (XRD), Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM) for structural and surface quality prior to the deposition of multilayer structure. Spectral analysis showed that the filter has an average transmission of greater than 90% in 450 to 700 nm range and less than 2% in 700-1100 nm band fulfilling the design requirements. The XRD study of multilayer structure showed few peaks of ZrO2 along with a solitary peak for SiO2 indicating some crystallinity for ZrO2 layers in the structure. Hardness analysis showed that the initial phase of the indentation is predominantly ductile with gradual transition in behaviour from ductile to brittle with increased penetration. Interface analysis of multilayered structure was carried out by Rutherford back scattering using Tandem 5 MeV ion accelerator, showed that interfaces formed in the multilayer structure are sharp and no substantial evidence of interlayer diffusion or mixing at the interfaces.


Type
Research Article
Copyright
© EDP Sciences, 2009

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Berezhinsky, L.I., Park, D.Y., Sung, C.M., Kwon, K.H., Chai, S.H., Semi. Cond. Phys., Quant. Electr. Optoelectr. 8, 106 (2005)
Berezhinsky, L., Kwon, K.H., Park, B.S., Jpn J. Appl. Phys. 40, 5953 (2001) CrossRef
F. Placido, A. Voronov, Proc. 45th Annual Technical Conf. of the Society of Vacuum Coaters, pp. 266–269 (2001)
Asghar, M.H., Placidon, F., Naseem, S., Eur. Phys. J. Appl. Phys. 35, 177 (2006) CrossRef
Software package “TFCALC”, Software Spectra Inc., www.sspectra.com
Nanoscope Command Reference Manual, Version 4.22ce, Digital Instruments Inc., 1997
G.L. Chen, C.C. Chang, Optical Filter for Screening out Infrared and Ultraviolet light, US patent No. 7215466B2 (2008)
A. Lakhtakia, R. Messier, Sculptured Thin Films (SPIE Press Bellingham, WA, 2005), pp. 67–90
Levichkova, M., Mankov, V., Starbov, N., Karashanova, D., Mednikarov, B., Starbova, K., Surf. Coat. Technol. 141, 70 (2001) CrossRef
Guo, H., Gong, S., Khor, K.A., Xu, H., Surf. Coat. Technol. 168, 23 (2003) CrossRef
Wada, K., Yamaguchi, N., Matsubara, H., Surf. Coat. Technol. 184, 55 (2004) CrossRef
Wada, K., Yamaguchi, N., Matsubara, H., Surf. Coat. Technol. 191, 367 (2005) CrossRef
Kato, T., Matsumoto, K., Matsubara, H. et al., Surf. Coat. Technol. 194, 16 (2005) CrossRef
W.F. Smith, Principles of Material Science and Engineering, 3rd edn. (McGraw-Hill Companies, 1995), p. 249