2 results
Plasma Modification Of Si-O-Si Bond Structure in Porous Sioch Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1079 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1079-N07-03
- Print publication:
- 2008
-
- Article
- Export citation
Moisture Induced Degradation of Porous Low-k Materials
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 914 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0914-F02-06
- Print publication:
- 2006
-
- Article
- Export citation