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RCA and IMEC/SC2 Clean: Metallic Immunity and Gate Oxide Integrity
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 225
- Print publication:
- 1997
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- Article
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Residual Damage in Heavily Germanium-Doped Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 207
- Print publication:
- 1992
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- Article
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