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Influence of flow ratio of N2 to (N2+Ar) mixture on the structure and properties of zirconium nitride films prepared by radio frequency magnetron sputtering
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- Journal:
- Journal of Materials Research / Volume 24 / Issue 10 / October 2009
- Published online by Cambridge University Press:
- 31 January 2011, pp. 3206-3212
- Print publication:
- October 2009
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- Article
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