The primary function of an SEM specimen stage is to optimize the orientation of the specimen to the signal detectors. The ease and precision with which the stage executes this function determine its utility to the microscopist. While the majority of scanning electron microscopes are equipped with general purpose five-axis specimen stages, a six-axis stage can significantly enhance specimen orientation. Specimen manipulation can be further simplified by incorporation of a six-axis hand controller that enables the microscopist to move the specimen intuitively as if the specimen were held directly in the hand.
SEM manufacturers typically install general purpose five-axis specimen stages in their scanning electron microscopes. In addition to translation along the X and Y axes, these stages are capable of tilt (T), elevation (Z motion), and rotation (R). Tilt directs the specimen surface toward the secondary electron detector to optimize signal collection. Elevation adjusts the working distance while rotation orients specific image features within the picture frame.