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Soft X-Rays and Extreme Ultraviolet Radiation

Soft X-Rays and Extreme Ultraviolet Radiation
Principles and Applications

$70.00 (Z)

  • Date Published: March 2007
  • availability: Manufactured on demand: supplied direct from the printer
  • format: Paperback
  • isbn: 9780521029971

$70.00 (Z)
Paperback

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About the Authors
  • This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.

    Reviews & endorsements

    "The region of the electromagnetic spectrum covered by this excellently written and produced book has only become available to exploitation over the last couple of decades or so...every researcher, teacher and student involved with the generation, manipulation or applications of electromagnetic radiation in this part of the spectrum should make space on their desk (not the bookshelf, since it won't spend much time there!) for this wonderful addition to the literature." Contemporary Physics

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    Product details

    • Date Published: March 2007
    • format: Paperback
    • isbn: 9780521029971
    • length: 504 pages
    • dimensions: 254 x 178 x 26 mm
    • weight: 0.87kg
    • contains: 255 b/w illus.
    • availability: Manufactured on demand: supplied direct from the printer
  • Table of Contents

    1. Introduction
    2. Radiation and scattering at EUV and soft X-ray wavelengths
    3. Wave propagation and refractive index at EUV and soft X-ray wavelengths
    4. Multilayer interference coatings
    5. Synchrotron radiation
    6. Physics of hot-dense plasmas
    7. Extreme ultraviolet and soft X-ray lasers
    8. Coherence at short wavelengths
    9. X-Ray microscopy with diffractive optics
    10. Extreme ultraviolet and X-ray lithography
    Appendices.

  • View all resources
    Group Section Name Type Size Sort Order filter vars
    General Resourceswww.coe.berkeley.edu/AST/sxr2009linkn/aSort Order general resources general resources general resources general resources
    General Resourceswww.coe.berkeley.edu/AST/sxreuvlinkn/aSort Order general resources general resources general resources general resources
    General Resourceswww.coe.berkeley.edu/AST/srmslinkn/aSort Order general resources general resources general resources general resources
    General ResourcesErrataErratapdf230KB0errata general resources errata general resourceserrata
    General ResourcesPlatesFile 4: Colorplates X-XIIpdf35968KB1plates general resources plates general resourcesplates
    General ResourcesPlatesFile 3: Colorplates VI-IXpdf18743KB2plates general resources plates general resourcesplates
    General ResourcesPlatesFile 7: Colorplates XIX-XXIpdf34347KB3plates general resources plates general resourcesplates
    General ResourcesPlatesFile 5: XIII and XIVpdf21277KB4plates general resources plates general resourcesplates
    General ResourcesPlatesFile 2: Colorplates IV and Vpdf11506KB5plates general resources plates general resourcesplates
    General ResourcesPlatesFile 9: Colorplates XXII and XXIII - PDF Formatzip557KB6plates general resources plates general resourcesplates
    General ResourcesPlatesFile 8: Colorplates XXII and XXIIIpdf52747KB7plates general resources plates general resourcesplates
    General ResourcesPlatesFile 6: Colorplates XV-XVIIIpdf30380KB8plates general resources plates general resourcesplates
    General ResourcesPlatesFile 1: Colorplates I-IIIpdf29594KB9plates general resources plates general resourcesplates

    These resources are provided free of charge by Cambridge University Press with permission of the author of the corresponding work, but are subject to copyright. You are permitted to view, print and download these resources for your own personal use only, provided any copyright lines on the resources are not removed or altered in any way. Any other use, including but not limited to distribution of the resources in modified form, or via electronic or other media, is strictly prohibited unless you have permission from the author of the corresponding work and provided you give appropriate acknowledgement of the source.

    If you are having problems accessing these resources please email cflack@cambridge.org

  • Author

    David Attwood, University of California, Berkeley

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