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Focused Ion Beam Systems
Basics and Applications

$214.99

Nan Yao, Nobutsugu Imanishi, Hyoung Ho (Chris) Kang, Clive Chandler, Matthew Weschler, Kaoru Ohya, Tohru Ishitani, Steve Reyntjens, Lucille A. Giannuzzi, E. L. Principe, Ampere A. Tseng, Richard Langford, T. Kamino, T. Yaguchi, T. Oshnishi, Mark Utlaut, Derren Dunn, Alan J. Kubis, Robert Hull, Daniel Recht, Kirk Hou, Toshiaki Fujii, Tatsuya Asahata, Takasho Kaito
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  • Date Published: October 2007
  • availability: Available
  • format: Hardback
  • isbn: 9780521831994

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  • The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.

    • Self-contained and comprehensive working knowledge of the full range of focused ion beam and two beam technology, including important developments in the field
    • Presents the principles, capabilities, challenges, advantages and applications of the technology and when best to implement it
    • Includes the possible ways in which the technology can fit into the future of nanotechnology and materials science by furthering the development of particular techniques
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    Product details

    • Date Published: October 2007
    • format: Hardback
    • isbn: 9780521831994
    • length: 408 pages
    • dimensions: 244 x 170 x 24 mm
    • weight: 0.85kg
    • availability: Available
  • Table of Contents

    List of contributors
    Preface
    1. Introduction to the focused ion beam system Nan Yao
    2. Interaction of ions with matter Nobutsugu Imanishi
    3. Gas assisted ion beam etching and deposition Hyoung Ho (Chris) Kang, Clive Chandler and Matthew Weschler
    4. Imagining using electrons and ion beams Kaoru Ohya and Tohru Ishitani
    5. Characterization methods using FIB/SEM DualBeam instrumentation Steve Rentjens and Lucille A. Giannuzzi
    6. High-density FIB-SEM 3D nanotomography: with applications of real-time imaging during FIB milling E. L. Principe
    7. Fabrication of nanoscale structures using ion beams Ampere A. Tseng
    8. Preparation for physico-chemical analysis Richard Langford
    9. In-situ sample manipulation and imaging T. Kamino, T. Yaguchi, T. Ohnishi and T. Ishitani
    10. Micro-machining and mask repair Mark Utlaut
    11. Three-dimensional visualization of nanostructured materials using focused ion beam tomography Derren Dunn, Alan J. Kubis and Robert Hull
    12. Ion beam implantation of surface layers Daniel Recht and Nan Yao
    13. Applications for biological materials Kirk Hou and Nan Yao
    14. Focused ion beam systems as a multifunctional tool for nanotechnology Toshiaki Fujii, Tatsuya Asahata and Takashi Kaito
    Index.

  • Editor

    Nan Yao, Princeton University, New Jersey

    Contributors

    Nan Yao, Nobutsugu Imanishi, Hyoung Ho (Chris) Kang, Clive Chandler, Matthew Weschler, Kaoru Ohya, Tohru Ishitani, Steve Reyntjens, Lucille A. Giannuzzi, E. L. Principe, Ampere A. Tseng, Richard Langford, T. Kamino, T. Yaguchi, T. Oshnishi, Mark Utlaut, Derren Dunn, Alan J. Kubis, Robert Hull, Daniel Recht, Kirk Hou, Toshiaki Fujii, Tatsuya Asahata, Takasho Kaito

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