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Polymer-based micromachined rectangular coaxial filters for millimeter-wave applications

  • Aline Jaimes-Vera (a1) (a2), Ignacio Llamas-Garro (a1), Maolong Ke (a3), Yi Wang (a3), Michael J. Lancaster (a3) and Lluís Pradell (a2)...
Abstract

In this paper, micromachined devices for millimeter-wave applications at U- and V-bands are presented. These structures are designed using a rectangular coaxial line built of gold-coated SU-8 photoresist layers, where the coaxial center conductor is suspended in air by stubs. The designs include a stepped coplanar waveguide (CPW)-to-coaxial transition at 63 GHz, with an insertion loss of 0.39 dB at 67.75 GHz and a return loss better than −10 dB across the band of operation between 54.7 and 70.3 GHz. Two filters have been designed; one centered at 42 GHz with a 10% bandwidth, and another at 63 GHz with a 5% bandwidth. Measured insertion losses of 0.77 and 2.59 dB were obtained for these filters, respectively. Measured return loss lower than 13.8 dB over the passband was achieved for both designs. The structures presented in this paper involve a low-cost manufacturing process suitable to produce integrated subsystems at millimeter waves.

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Corresponding author
Corresponding author: I. Llamas-Garro Email: llamasi@ieee.org
References
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[1]Marsh E.D.; Reid J.R.; Vasilyev V.S.: Gold-plated micromachined millimeter-wave resonator based on rectangular coaxial transmission lines. IEEE Trans. Microw. Theory Tech., 55 (1) (2007), 7884.
[2]Chen R.; Brown E.; Bang C.: A compact low-loss Ka-band filter using 3-dimensional micromachined integrated coax, in Proc. of IEEE Int. Conf. on MEMS, Maastricht, The Netherlands, January 2004, 801804.
[3]Vanhille K.J.; Fontaine D.L.; Nichols C.; Popovic Z.; Filipovic D.S.: Ka-band miniaturized quasi-planar high-Q resonators. IEEE Trans. Microw. Theory Tech., 55 (6) (2007), 12721279.
[4]Lukic M.; Kim K.; Lee Y.; Saito Y.; Filipovic D.S.: Multi-physics design and performance of a surface-micromachined ka-band cavity backed patch antenna, in Microwave and Optoelectronics Conf., 29 October 2007–1 November 2007, 321324.
[5]Jiang K.; Lancaster M.J.; Llamas-Garro I.; Jin P.: SU-8 Ka-band filter and its microfabrication. J. Micromech. Microeng., 15 (2005), 15221526.
[6]Lancaster M.J.; Zhou J.; Ke M.; Wang Y.; Jiang K.: Design and high performance of a micromachined K-band rectangular coaxial cable. IEEE Trans. Microw. Theory Tech., 55 (7) (2007), 15481553.
[7]Pan B.; Li Y.; Tentzeris M. M.; Papapolymerou J.: A novel low-loss integrated 60 GHz cavity filter with source-load coupling using surface micromachining technology, in Microwave Symp. Digest IEEE MTT-S Int., 2008, 639642.
[8]Choi S.T.; Yang K.S.; Tokuda K.; Kim Y.H.: AV-band planar narrow bandpass filter using a new type integrated waveguide transition. IEEE Microw. Wirel. Compon. Lett., 14 (12) (2004) 545547.
[9]Ferrand P. et al. : Compact quasi planar silicon bandpass filters based on metallic periodic structure for Q and V band applications. Microw. Symp. Dig. IEEE MTT-S Int., 3 (2004), 14591462.
[10]Reid J.R.; Webster R.T.: A compact integrated coaxial V-band bandpass filter. Antennas Propag. Soc. Symp., 1 (2004), 990993.
[11]Lee J.-H.; Kidera N.; Pinel S.; Laskar J.; Tentzeris M.M.: A compact quasi-elliptic dual-mode cavity filter using LTCC technology for V-band WLAN gigabit wireless systems, in Proc. 36th European Microwave Conf., September 2006, 13771379.
[12]Zhang X. et al. : A compact V-band planar wideband bandpass filter based on liquid crystal polymer substrates, in Electronic System-Integration Technology Conf. ESTC, 2008, 163168.
[13]Chen R.T.; Brown E.R.: An ultra-compact low loss 30-GHz micromachined coaxial filter, in European Microwave Conf., 2005.
[14]Chen R.; Brown E.; Bang C.: A compact low-loss Ka-band filter using 3- dimensional micromachined integrated coax, in 2004 Proc. of IEEE Int. Conf. on MEMS, Maastricht, The Netherlands, January 2004, 801804.
[15]Vanhille K.J.; Fontaine D.L.; Nichols C.; Popovic Z.; Filipovic D.S.: Ka-band miniaturized quasi-planar high-Q resonators. IEEE Trans. Microw. Theory Tech., 55 (6) (2007), 12721279.
[16]Hong J.-S.; Lancaster M. J.: Microstrip Filters for RF/Microwave Applications, John Wiley and Sons Inc, 2001.
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International Journal of Microwave and Wireless Technologies
  • ISSN: 1759-0787
  • EISSN: 1759-0795
  • URL: /core/journals/international-journal-of-microwave-and-wireless-technologies
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