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Characterization of boron nitride thin films prepared from a polymer precursor

  • V. Z-H. Chan (a1), J. B. Rothman (a2), P. Palladino (a1), L. G. Sneddon (a3) and R. J. Composto (a1)
  • DOI: http://dx.doi.org/10.1557/JMR.1996.0045
  • Published online: 01 January 2011
Abstract

Excellent quality boron nitride (BN) thin films on silicon have been produced by a simple procedure involving spincoating solutions of the “single-source” polymeric-precursor polyborazylene, (B3N3H∼4)x, on a silicon substrate, followed by pyrolysis at 900 °C. Rutherford backscattering spectrometry (RBS) indicates that the B/N ratios are 1.37 and 1.09 for conversions carried out in a vacuum oven at 900 and 1250 °C, respectively. Forward recoil spectrometry (FRES) showed that the atomic percent of residual hydrogen is 10 and 9%, respectively. Plain-view and cross-sectional scanning electron microscopy (SEM) studies showed that the samples annealed at 900 °C were clean and uniform in thickness. A thickness of 800 × 1015 atoms/cm2 was determined by ion scattering. Films annealed to 1250 °C likewise showed a continuous unbroken boron nitride layer, but also exhibited morphological features resulting from reactions of the underlying silicon oxide-silicon interface in the substrate. Auger electron spectroscopy and atomic force microscopy showed that the BN coating produced at this higher temperature remained unbroken but had a surface area of ∼15% covered by dimples 2–7 nm in depth. Compared to typical films made by chemical vapor deposition, BN films produced from this “single-source” method have lower hydrogen and carbon concentrations.

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1.R. T. Paine and C. K. Narula , Chem. Rev. 90, 73 (1990).

2.S. S. Dana and J.R. Maldonado , J. Vac. Sci. Technol. B 4, 235 (1986).

3.J. A. Hanigofsky , K.L. More , W.J. Lackey , W.Y. Lee , and G.B. Freeman , J. Am. Ceram. Soc. 74, 301 (1991).

4.J. Kouvetakis , V. V. Patel , C. W. Miller , and D. B. Beach , J. Vac. Sci. Technol. A 8, 3929 (1990).

5.N. Patibandla and K. L. Luthra , J. Electrochem. Soc. 139, 3558 (1992).

7.S. V. Nguyen , T. Nguyen , H. Treichel , and O. Spindler , J. Electrochem. Soc. 141, 1633 (1994).

8.J. Smeets , V. Van Den Bergh , J. Meneve , E. Dekempeneer , and L. De Wilde, Thin Solid Films 228, 272 (1993).

9.T. P. Smirnova , L. V. Jakovkina , I. L. Jashkin , N. P. Sysoeva , and J. I. Amosov , Thin Solid Films 237, 32 (1994).

10.P. J. Fazen , J.S. Beck , A.T. Lynch , E.E. Remsen , and L.G. Sneddon , Chem. Mater. 2, 96 (1990).

11.P. J. Fazen , E. E. Remsen , J. S. Beck , P. J. Carroll , A. R. McGhie , and L. G. Sneddon , Chem. Mater. 7, 1942 (1995).

12.T. Wideman and L.G. Sneddon , Inorg. Chem. 34, 1002 (1995).

13.L. R. Doolittle , Nucl. Instrum. Methods B 9, 344 (1985).

14.L. C. McIntyre Jr., J. A. Leavitt , M. D. Ashbaugh , Z. Lin , and J. O. Stoner Jr., Nucl. Instrum. Methods B 64, 457 (1992).

15.K. J. Wynne and R. W. Rice , Ann. Rev. Mater. Sci. 14, 297 (1984).

17.D-P. Kim and J. Economy , Chem. Mater. 5, 1216 (1993).

19.D. Kim and J. Economy , Chem. Mater. 6, 395 (1994).

20.S. L. Ren , A.M. Rao , P.C. Eklund , and G.L. Doll , Appl. Phys. Lett. 62, 1760 (1993).

21.J. P. Riviere , Y. Pacaud , and M. Cahoreau , Thin Solid Films 227, 44 (1993).

22.A. K. Ballal , L. Salamanca-Riba , C. A. Taylor II, and G. L. Doll , Thin Solid Films 224, 46 (1993).

23.T. M. Duncan , R.A. Levy , P. K. Gallagher , and M. W. Walsh Jr., J. Appl. Phys. 64, 2990 (1988).

24.T. A. Friedmann , K.F. McCarty , E.J. Klaus , D. Boehme , W. M. Clift , H. A. Johnsen , M. J. Mills , and D. K. Ottesen , Appl. Phys. Lett. 61, 2406 (1992).

25.J. E. E. Baglin , A. J. Kellock , M. A. Crockett , and A. H. Shih , Nucl. Instrum. Methods B 64, 469 (1992).

26.S. M. Gorbatkin , R.F. Burgie , W.C. Oliver , J. C. Barbour , T. M. Mayer , and M.L. Thomas , J. Vac. Sci. Technol. A 11, 1863 (1993).

27.R. A. Levy , D. J. Resnick , R.C. Frye , A. W. Yanof , G. M. Wells , and F. Cerrina , J. Vac. Sci. Technol. B 6, 154 (1988).

28.B. S. Swartzentruber , Y. W. Mo , M. B. Webb , and M. G. Lagally , J. Vac. Sci. Technol. A 7, 2901 (1989).

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