Skip to main content
×
Home
    • Aa
    • Aa

Fabrication of ultrathin film capacitors by chemical solution deposition

  • Geoff L. Brennecka (a1) and Bruce A. Tuttle (a1)
Abstract

A facile solution-based processing route using standard spin-coating deposition techniques has been developed for the production of reliable capacitors based on lead lanthanum zirconate titanate (PLZT) with active areas of ⩾1 mm2 and dielectric layer thicknesses down to 50 nm. With careful control of the dielectric phase development through improved processing, ultrathin capacitors exhibited slim ferroelectric hysteresis loops and dielectric constants of >1000, similar to those of much thicker films. Thus, it has been demonstrated that chemical solution deposition is a viable route to the production of capacitor films which are as thin as 50 nm but are still macroscopically addressable with specific capacitance values >160 nF/mm2.

Copyright
Corresponding author
a)Address all correspondence to this author. e-mail: glbrenn@sandia.gov
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1 N. Setter , D. Damjanovic , L. Eng , G. Fox , S. Gevorgian , S. Hong , A. Kingon , H. Kohlstedt , N.Y. Park , G.B. Stephenson , I. Stolitchnov , A.K. Taganstev , D.V. Taylor , TYamada S. Streiffer : Ferroelectric thin films: Review of materials, properties, and applications. J. Appl. Phys. 100, 0516062006

2 S. Trolier-McKinstry P. Muralt : Thin film piezoelectrics for MEMS. J. Electroceram. 12, 72004

3 G.L. Brennecka , W. Huebner , B.A. Tuttle P.G. Clem : Use of stress to produce highly oriented tetragonal lead zirconate titanate (PZT 40/60). J. Am. Ceram. Soc. 87, 14592004

4 C.H. Ahn , K.M. Rabe J-M. Triscone : Ferroelectricity at the nanoscale: Local polarization in oxide thin films and heterostructures. Science 303, 4882003

5 A. Rudiger , T. Schneller , A. Roelofs , S. Tiedke , T. Schmitz R. Waser : Nanosize ferroelectric oxides–tracking down the superparaelectric limit. Appl. Phys. A 80, 12472005

6 Y.S. Kim , D.H. Kim , J.D. Kim , Y.J. Chang , T.W. Noh , J.H. Kong , K. Char , Y.D. Park , S.D. Bu , J-G. Yoon J-S. Chung : Critical thickness of ultrathin ferroelectric BaTiO3 films. Appl. Phys. Lett. 86, 1029072005

7 D.D. Fong C. Thompson : In-situ synchrotron x-ray studies of ferroelectric thin films. Annu. Rev. Mater. Res. 36, 4312006

10 G. Yi , Z. Wu M. Sayer : Preparation of Pb(Zr,Ti)O3 thin films by sol gel processing: Electrical, optical, and electro-optic properties. J. Appl. Phys. 64, 27171988

11 T. Tani D.A. Payne : Lead oxide coatings on sol-gel-derived lead lanthanum zirconate titanate thin layers for enhanced crystallization into the perovskite structure. J. Am. Ceram. Soc. 77, 12421994

12 K.T. Miller , F.F. Lange D.B. Marshall : The instability of polycrystalline thin films. J. Mater. Res. 5, 1511990

13 A. Seifert , A. Vojta , J.S. Speck F.F. Lange : Microstructural instability in single-crystal thin films. J. Mater. Res. 11, 14701996

14 M.H. Frey D.A. Payne : Grain-size effect on structure and phase transformations for barium titanate. Phys. Rev. B 54, 31581996

15 T.M. Shaw , S. Trolier-McKinstry P.C. McIntyre : The properties of ferroelectric films at small dimensions. Annu. Rev. Mater. Sci. 30, 2632000

16 J.H. Park S. Trolier-McKinstry : Dependence of dielectric and piezoelectric properties on film thickness for highly {100}-oriented lead magnesium niobate-lead titanate (70/30). J. Mater. Res. 16, 268(2001)

18 S.V. Kalinin and D.A. Bonnell : Local potential and polarization screening on ferroelectric surfaces. Phys. Rev. B 63, 1254112001

19 M. Stengel and N.A. Spaldin : Origin of the dielectric dead layer in nanoscale capacitors. Nature 443, 6792006

20 D.B. Dimos , R.W. Schwartz and S.J. Lockwood : Control of leakage resistance in Pb(Zr,Ti)O3 thin films by donor doping. J. Am. Ceram. Soc. 77, 30001994

21 D.B. Dimos and C.H. Mueller : Perovskite thin films for high-frequency capacitor applications. Annu. Rev. Mater. Sci. 28, 3971998

24 S-Y. Chen and I-W. Chen : Temperature-time texture transition of Pb(Zr1-xTix)O3 thin films: I, role of Pb-rich intermediate phases. J. Am. Ceram. Soc. 77, 23321994

25 A. Wu , P.M. Vilarinho , I.M. Miranda Salvado , J.L. Baptista , Z. Zhou , I.M. Reaney , A.R. Ramos and M.F. de Silva : Effect of lead zirconate titanate seeds on PtxPb formation during the pyrolysis of lead zirconate titanate thin films. J. Am. Ceram. Soc. 85, 6412002

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords:

Metrics

Full text views

Total number of HTML views: 4
Total number of PDF views: 10 *
Loading metrics...

Abstract views

Total abstract views: 53 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 26th September 2017. This data will be updated every 24 hours.