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Film thickness dependent microstructural changes of thick copper metallizations upon thermal fatigue

  • Stephan Bigl (a1), Claus O.W. Trost (a1), Stefan Wurster (a1), Megan J. Cordill (a2) and Daniel Kiener (a1)...

With increasing performance requirements in power electronics, the necessity has emerged to investigate the thermo-mechanical behavior of thick Cu metallizations (≥5 µm). Cu films on rigid substrates in the range of 5–20 µm were thermally cycled between 170 and 400 °C by a fast laser device. Compared to the initial microstructures, a texture transition toward the {100} out-of-plane orientation with increasing film thickness was observed during thermo-mechanical cycling, along with an abnormal grain growth in the {100}-oriented grains and a gradual development of substructures in a crystallographic arrangement. Compared to the well-studied thin Cu film counterparts (≤5 µm), the surface damage showed a 1/h f dependency. Transition from an orientation independent (h f = 5 µm) to an orientation specific thermo-mechanical fatigue damage (h f = 10, 20 µm) was observed following a higher damager tolerance in {100} oriented grains.

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Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
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