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Hu, Yuhang Chan, Edwin P. Vlassak, Joost J. and Suo, Zhigang 2011. Poroelastic relaxation indentation of thin layers of gels. Journal of Applied Physics, Vol. 110, Issue. 8, p. 086103.
Yang, Fut K. Zhang, Wei Han, Yougun Yoffe, Serge Cho, Yungchi and Zhao, Boxin 2012. “Contact” of Nanoscale Stiff Films. Langmuir, Vol. 28, Issue. 25, p. 9562.
Wu, Xiaoxia and Xu, Terry T. 2012. Measurement of mechanical properties of alkaline-earth metal hexaboride one-dimensional nanostructures by nanoindentation. Journal of Materials Research, Vol. 27, Issue. 09, p. 1218.
Wu, Y.F. Yu, H.Y. and Chen, W.Q. 2012. Mechanics of indentation for piezoelectric thin films on elastic substrate. International Journal of Solids and Structures, Vol. 49, Issue. 1, p. 95.
Yeap, Kong Boon Zschech, Ehrenfried Hangen, Ude D. Wyrobek, Thomas Kong, Lay Wai Karmakar, Aditya Xu, Xiaopeng and Panchenko, Iuliana 2012. Elastic anisotropy of Cu and its impact on stress management for 3D IC: Nanoindentation and TCAD simulation study. Journal of Materials Research, Vol. 27, Issue. 01, p. 339.
Li, Han Kobrinsky, Mauro J. Shariq, Ahmed Richards, John Liu, Jimmy and Kuhn, Markus 2013. Controlled fracture of Cu/ultralow-k interconnects. Applied Physics Letters, Vol. 103, Issue. 23, p. 231901.
Zhang, Chunyu Zhao, Meng Liu, Yulan and Wang, Biao 2013. Extracting the elastic moduli of the constituent layers of a multilayered thin film from nanoindentation tests. Journal of Materials Research, Vol. 28, Issue. 18, p. 2570.
Li, Han Lin, Kevin and Ege, Canay 2015. Buffer layer structure for measuring the elastic properties of brittle thin films by nanoindentation with application on nanoporous low-k dielectrics. Journal of Applied Physics, Vol. 117, Issue. 11, p. 115303.
Diliegros-Godines, Carolina. J. Flores-Ruiz, Francisco Javier Castanedo-Pérez, Rebeca Torres-Delgado, Gerardo and Broitman, Esteban 2016. Handbook of Sol-Gel Science and Technology. p. 1.
Zhou, Ying and Li, Han 2016. Metrology and Diagnostic Techniques for Nanoelectronics. p. 493.
Reggente, M. Natali, M. Passeri, D. Lucci, M. Davoli, I. Pourroy, G. Masson, P. Palkowski, H. Hangen, U. Carradò, A. and Rossi, M. 2017. Multiscale mechanical characterization of hybrid Ti/PMMA layered materials. Colloids and Surfaces A: Physicochemical and Engineering Aspects, Vol. 532, Issue. , p. 244.
Diliegros-Godines, Carolina J. Flores-Ruiz, Francisco Javier Castanedo-Pérez, Rebeca Torres-Delgado, Gerardo and Broitman, Esteban 2018. Handbook of Sol-Gel Science and Technology. p. 1513.
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Indentation experiments on thin films are analyzed by using a rigorous solution to model elastic substrate effects. Two cases are discussed: elastic indentations where film and substrate are anisotropic and elastoplastic indentations where significant material pileup occurs. We demonstrate that the elastic modulus of a thin film can be accurately measured in both cases, even if there is significant elastic mismatch between film and substrate.
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- ISSN: 0884-2914
- EISSN: 2044-5326
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