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Precipitation phenomena in high-dose iron-implanted silica and annealing behavior

Published online by Cambridge University Press:  31 January 2011

A. Perez ,
M. Treilleux ,
T. Capra  and
D. L. Griscom
A. Perez
Affiliation:
Departement de Physique de Matériaux, Université Claude Bernard-Lyon 169622 Villeurbanne Cédex, France
M. Treilleux
Affiliation:
Departement de Physique de Matériaux, Université Claude Bernard-Lyon 169622 Villeurbanne Cédex, France
T. Capra
Affiliation:
Departement de Physique de Matériaux, Université Claude Bernard-Lyon 169622 Villeurbanne Cédex, France
D. L. Griscom
Affiliation:
Naval Research Laboratory, Washington, DC 20375
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Abstract

The effects of high-dose iron implantation into high-purity fused silica have been investigated by conversion-electron Mössbauer spectroscopy, transmission electron microscopy, Rutherford backscattering, and optical spectroscopy. In addition to isolated Fe2+ ions, samples subjected to doses of 4⊠1016 and 6 ⊠ 1016 ions cm−2 were found to contain homogeneously dispersed, equidimensional, crystalline particles ⋍2 nm, similar to Fe3O4. Precipitated spherical particles of metallic α-Fe⋍4 nm were observed in samples receiving a dose of ⋍ 1017 ions cm−2; as the dose was raised to 2.5 ⊠ 1017 ions cm−2 the mean size of these particles reached ⋍ 30 nm. Annealing in air to 800°C resulted in the growth of acicular grains of α-Fe2O3 ⋍ 20–300 nm. The optical spectra of the implanted layers are compared with the predictions of small particle theory.

Type
Articles
Information
Journal of Materials Research , Volume 2 , Issue 6 , December 1987 , pp. 910 - 917
Copyright
Copyright © Materials Research Society 1987

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References

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