Skip to main content
×
Home
    • Aa
    • Aa

Substrate effects on indentation plastic zone development in thin soft films

  • D. E. Kramer (a1), A. A. Volinsky (a2), N. R. Moody (a3) and W. W. Gerberich (a4)
Abstract

Plastic zone evolution in Al–2 wt% Si metal films on silicon and sapphire substrates was studied using nanoindentation and atomic force microscopy (AFM). AFM was used to measure the extent of plastic pileup, which is a measure of the plastic zone radius in the film. It was found that the plastic zone size develops in a self-similar fashion with increasing indenter penetration when normalized by the contact radius, regardless of film hardness or underlying substrate properties. This behavior was used to develop a hardness model that uses the extent of the plastic zone radius to calculate a core region within the indenter contact that is subject to an elevated contact pressure. AFM measurements also indicated that as film thickness decreases, constraint imposed by the indenter and substrate traps the film thereby reducing the pileup volume.

Copyright
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

1. D. Lebouvier , P. Gilormini , and E. Felder , J. Phys. D 18, 199 (1985).

2. A.K. Bhattacharya and W.D. Nix , Int. J. Sol. Struct. 27, 1047 (1991).

3. D. Lebouvier , P. Gilormini , and E. Felder , Thin Solid Films 172, 227 (1989).

4. B. Joönsson and S. Hogmark , Thin Solid Films 114, 257 (1984).

6. P.J. Burnett and T.F. Page , J. Mater. Sci. 19, 845 (1984).

7. P.J. Burnett and D.S. Rickerby , Thin Solid Films 148, 41 (1987).

8. P.J. Burnett and D.S. Rickerby , Thin Solid Films 148, 51 (1987).

10. J-H. Ahn and D. Kwon , J. Appl. Phys. 82, 3266 (1997).

12. A.K. Bhattacharya and W.D. Nix , Int. J. Sol. Struct. 24, 1287 (1988).

13. M. Wittling , A. Bendavid , P.J. Martin , and M.V. Swain , Thin Solid Films 270, 283 (1995).

15. D.M. Marsh , Proc. R. Soc. London A 279, 420 (1964).

16. K.L. Johnson , J. Mech. Phys. Sol. 18, 115 (1970).

17. S.S. Chiang , D.B. Marshall , and A.G. Evans , J. Appl. Phys. 53, 298 (1982).

18. I.J. Ford , Thin Solid Films 245, 122 (1994).

25. C-J. Lu and D.B. Bogy , Int. J. Solids Struct. 32, 1759 (1995).

27. D. Kramer , H. Huang , M. Kriese , J. Robach , J. Nelson , A. Wright , D. Bahr , and W.W. Gerberich , Acta Mater. 47, 333 (1999).

29. W. Zielinski , H. Huang , S. Venkataraman , and W.W. Gerberich , Phil. Mag. A 72, 1221 (1995).

30. L.E. Samuels and T.O. Mulhearn , J. Mech. Phys. Solids 5, 125 (1957).

32. G.M. Pharr , W.C. Oliver , R.F. Cook , P.D. Kirchner , M.C. Kroll , T.R. Dinger , and D.R. Clarke , J. Mater. Res. 7, 961 (1992).

35. A.G. Dirks , P.E. Wierenga , and J.J. van den Broek , Thin Solid Films 172, 51 (1989).

36. B.R. Lawn , A.G. Evans , and D.B. Marshall , J. Am. Ceram. Soc. 63, 574 (1980).

38. M.R. Castell , G. Shafirstein , and D.A. Ritchie , Philos. Mag. A 74, 1185 (1996).

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Journal of Materials Research
  • ISSN: 0884-2914
  • EISSN: 2044-5326
  • URL: /core/journals/journal-of-materials-research
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 48 *
Loading metrics...

Abstract views

Total abstract views: 116 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 21st September 2017. This data will be updated every 24 hours.