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Synthesis and properties of p-type nitrogen-doped ZnO thin films by pulsed laser ablation of a Zn-rich Zn3N2 target

Published online by Cambridge University Press:  31 January 2011

A. Allenic ,
W. Guo ,
Y.B. Chen ,
G.Y. Zhao ,
X.Q. Pan ,
Y. Che ,
Z.D. Hu  and
B. Liu
A. Allenic
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109
W. Guo
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109
Y.B. Chen
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109
G.Y. Zhao
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109
X.Q. Pan*
Affiliation:
Department of Materials Science and Engineering, University of Michigan, Ann Arbor, Michigan 48109
Y. Che
Affiliation:
Functional Materials Group, IMRA America, Inc., Ann Arbor, Michigan 48105
Z.D. Hu
Affiliation:
Functional Materials Group, IMRA America, Inc., Ann Arbor, Michigan 48105
B. Liu
Affiliation:
Functional Materials Group, IMRA America, Inc., Ann Arbor, Michigan 48105
*
a)Address all correspondence to this author. e-mail: panx@umich.edu
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Abstract

Epitaxial ZnO thin films doped uniformly with nitrogen at 1020 atoms/cm3 were fabricated by pulsed laser ablation of a Zn-rich Zn3N2 target. The films grown at 300 °C and annealed at 600 °C in O2 showed p-type conductivity. Two acceptor levels at 105 and 224 meV were determined by temperature-dependent Hall and photoluminescence measurements of the p-type samples. Transmission electron microscopy studies revealed that the p-type ZnO films consist of 10–20 nm columnar grains with a high density of defects and grain boundaries that may facilitate the annihilation of native donors and the activation of acceptors during postdeposition annealing.

Keywords

II-VIDopantMicrostructure
Type
Articles
Information
Journal of Materials Research , Volume 22 , Issue 8 , August 2007 , pp. 2339 - 2344
Copyright
Copyright © Materials Research Society 2007

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References

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