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    This article has been cited by the following publications. This list is generated based on data provided by CrossRef.
    Wang, K.F. Wang, B.L. and Zeng, S. 2018. Analysis of an array of flexoelectric layered nanobeams for vibration energy harvesting. Composite Structures, Vol. 187, Issue. , p. 48.
    Pasharavesh, Abdolreza Ahmadian, M. T. and Zohoor, H. 2017. Electromechanical modeling and analytical investigation of nonlinearities in energy harvesting piezoelectric beams. International Journal of Mechanics and Materials in Design, Vol. 13, Issue. 4, p. 499.
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Fabrication and Evaluation of a MEMS Piezoelectric Bimorph Generator for Vibration Energy Harvesting

  • B. S. Lee (a1), S. C. Lin (a1) and W. J. Wu (a2)
Abstract

We present the development of a MEMS piezoelectric bimorph generator, a cantilever type bimorph which was formed by laminating two PZT piezoelectric layers. Our bimorph generator can scavenge mechanical energy from ambient vibrations and transform it into useful electrical energy. Two poling configurations of the PZT piezoelectric layers of our bimorph MEMS generator were fabricated and tested. A tip proof mass used for adjusting the resonance frequency was also demonstrated. Experimental results confirm that our device possessed a maximum open-circuit output voltage of 1.91VP-P and a 3.42VP-P for a parallel polarization device and a serial polarization device, respectively with a 2g externally applied vibration. At an optimal resistive load, the maximum output power was 1.548μ–W and 1.778μ–W for a parallel polarization device and a serial polarization device, respectively.

Copyright
COPYRIGHT: © The Society of Theoretical and Applied Mechanics, R.O.C. 2010
Corresponding author
* Graduate student
** Associate professor, corresponding author
References
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Journal of Mechanics
  • ISSN: 1727-7191
  • EISSN: 1811-8216
  • URL: /core/journals/journal-of-mechanics
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