Hussain, Atif Gao (高勋), Xun Li (李奇), Qi Hao (郝作强), Zuoqiang and Lin (林景全), Jingquan 2017. Combined effects of ambient gas pressures and magnetic field on laser plasma expansion dynamics. Plasma Science and Technology, Vol. 19, Issue. 1, p. 015505.
Sizyuk, V. and Hassanein, A. 2015. Heat loads to divertor nearby components from secondary radiation evolved during plasma instabilities. Physics of Plasmas, Vol. 22, Issue. 1, p. 013301.
Fang, Zhiqiang Xia, Kegui Yao, Yao and Li, Jianlang 2014. Radially polarized LG01-mode Nd:YAG laser with annular pumping. Applied Physics B, Vol. 117, Issue. 1, p. 219.
Kim, D. J. Kim, J. W. and Clarkson, W. A. 2014. High-power master-oscillator power-amplifier with optical vortex output. Applied Physics B, Vol. 117, Issue. 1, p. 459.
Sizyuk, Valeryi and Hassanein, Ahmed 2014. Efficient Monte Carlo Simulation of Heat Conduction Problems for Integrated Multi-Physics Applications. Numerical Heat Transfer, Part B: Fundamentals, Vol. 66, Issue. 5, p. 381.
Sizyuk, Tatyana and Hassanein, Ahmed 2014. Optimizing laser produced plasmas for efficient extreme ultraviolet and soft X-ray light sources. Physics of Plasmas, Vol. 21, Issue. 8, p. 083106.
Fu, Wen Liang, Edison P. Fatenejad, Milad Lamb, Donald Q. Grosskopf, Michael Park, Hye-Sook Remington, Bruce and Spitkovsky, Anatoly 2013. Increase of the density, temperature and velocity of plasma jets driven by a ring of high energy laser beams. High Energy Density Physics, Vol. 9, Issue. 2, p. 336.
Kim, D. J. Kim, J. W. and Clarkson, W. A. 2013. Q-switched Nd:YAG optical vortex lasers. Optics Express, Vol. 21, Issue. 24, p. 29449.
Sizyuk, Tatyana and Hassanein, Ahmed 2013. The role of plasma evolution and photon transport in optimizing future advanced lithography sources. Journal of Applied Physics, Vol. 114, Issue. 8, p. 083109.
Kmetík, V. Limpouch, J. Liska, R. and Váchal, P. 2012. Modeling of annular-laser-beam-driven plasma jets from massive planar targets. Laser and Particle Beams, Vol. 30, Issue. 03, p. 445.
Sizyuk, T. and Hassanein, A. 2012. Enhancing extreme ultraviolet photons emission in laser produced plasmas for advanced lithography. Physics of Plasmas, Vol. 19, Issue. 8, p. 083102.
Sizyuk, T. and Hassanein, A. 2012. Optimization of extreme ultraviolet photons emission and collection in mass-limited laser produced plasmas for lithography application. Journal of Applied Physics, Vol. 112, Issue. 3, p. 033102.
Harilal, Sivanandan S. Polek, Mathew P. and Hassanein, Ahmed 2011. Jetlike Emission From Colliding Laser-Produced Plasmas. IEEE Transactions on Plasma Science, Vol. 39, Issue. 11, p. 2780.
Kim, J. W. Mackenzie, J. I. Hayes, J. R. and Clarkson, W. A. 2011. High power Er:YAG laser with radially-polarized Laguerre-Gaussian (LG_01) mode output. Optics Express, Vol. 19, Issue. 15, p. 14526.
Kumar, Ajai George, Sony Singh, R.K. Joshi, Hem and Nampoori, V.P.N. 2011. Image analysis of expanding laser-produced lithium plasma plume in variable transverse magnetic field. Laser and Particle Beams, Vol. 29, Issue. 02, p. 241.
Sizyuk, Valeryi and Hassanein, Ahmed 2011. Integrated models to study the impact of ELMs and disruptions on lithium in the NSTX divertor. Journal of Nuclear Materials, Vol. 415, Issue. 1, p. S881.
Kumar, Ajai George, Sony Singh, R.K. and Nampoori, V.P.N. 2010. Influence of laser beam intensity profile on propagation dynamics of laser-blow-off plasma plume. Laser and Particle Beams, Vol. 28, Issue. 03, p. 387.
Sizyuk, V. and Hassanein, A. 2010. Damage to nearby divertor components of ITER-like devices during giant ELMs and disruptions. Nuclear Fusion, Vol. 50, Issue. 11, p. 115004.
Yeates, P. and Kennedy, E. T. 2010. Plasma dynamics of a confined extreme ultraviolet light source. Physics of Plasmas, Vol. 17, Issue. 9, p. 093104.
Yeates, P. and Kennedy, E. T. 2010. Spectroscopic, imaging, and probe diagnostics of laser plasma plumes expanding between confining surfaces. Journal of Applied Physics, Vol. 108, Issue. 9, p. 093306.
Laser-produced plasma (LPP) devices are being developed as a light source for the extreme ultraviolet (EUV) lithography applications. One concern of such devices is to increase the conversion efficiency of laser energy to EUV light. A new idea based on the initiation and confinement of cumulative plasma jet inside a hollow laser beam is developed and simulated. The integrated computer model (HEIGHTS) was used to simulate the plasma behavior and the EUV radiation output in the LPP devices. The model takes into account plasma heat conduction and magnetohydrodynamic processes in a two-temperature approximation, as well as detailed photon radiation transport in 3D Monte Carlo model. The model employs cylindrical 2D version of a total variation-diminishing scheme (for the plasma hydrodynamics) and an implicit scheme with the sparse matrix linear solver (to describe heat conduction). Numerical simulations showed that the EUV efficiency of the proposed hollow-beam LPP device to be higher than the current standard devices.
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