Hostname: page-component-8448b6f56d-tj2md Total loading time: 0 Render date: 2024-04-19T22:26:43.955Z Has data issue: false hasContentIssue false
  • English
  • Français

Advanced Low Energy Focused Ion Beam Design Based on Immersion Optics

Published online by Cambridge University Press:  07 September 2007

Rauscher M ,
Marianowski K ,
Degel B  and
Plies E
Rauscher M
Affiliation:
University of Tübingen,Germany
Marianowski K
Affiliation:
University of Tübingen,Germany
Degel B
Affiliation:
University of Tübingen,Germany
Plies E
Affiliation:
University of Tübingen,Germany
Get access

Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 14 - 15
Copyright
Copyright © Microscopy Society of America 2007

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)