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Atom Probe Tomography Analysis of Thick Film SiO2 and Oxide Interfaces: Conditions Leading to Improved Analysis Yield

Published online by Cambridge University Press:  08 April 2017

T Prosa ,
D Lawrence ,
D Olson ,
D Lenz ,
J Bunton  and
D Larson
T Prosa
Affiliation:
Cameca Instruments, Inc
D Lawrence
Affiliation:
Cameca Instruments, Inc
D Olson
Affiliation:
Cameca Instruments, Inc
D Lenz
Affiliation:
Cameca Instruments, Inc
J Bunton
Affiliation:
Cameca Instruments, Inc
D Larson
Affiliation:
Cameca Instruments, Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 750 - 751
Copyright
Copyright © Microscopy Society of America 2011