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Automated Analysis of SEM X-Ray Spectral Images: A Powerful New Microanalysis Tool

  • Paul G. Kotula (a1), Michael R. Keenan (a1) and Joseph R. Michael (a1)
  • DOI: http://dx.doi.org/10.1017/S1431927603030058
  • Published online: 01 January 2003
Abstract

Spectral imaging in the scanning electron microscope (SEM) equipped with an energy-dispersive X-ray (EDX) analyzer has the potential to be a powerful tool for chemical phase identification, but the large data sets have, in the past, proved too large to efficiently analyze. In the present work, we describe the application of a new automated, unbiased, multivariate statistical analysis technique to very large X-ray spectral image data sets. The method, based in part on principal components analysis, returns physically accurate (all positive) component spectra and images in a few minutes on a standard personal computer. The efficacy of the technique for microanalysis is illustrated by the analysis of complex multi-phase materials, particulates, a diffusion couple, and a single-pixel-detection problem.

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Corresponding author. E-mail: pgkotul@sandia.gov
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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