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Automated STEM/EDS Metrology Characterization of 3D NAND Devices

Published online by Cambridge University Press:  04 August 2017

Zhenxin Zhong ,
Justin Roller ,
Oleksii Bidiuk ,
Jeff Blackwood ,
Martin Verheijen ,
Ozan Ugurlu  and
Jason Donald
Zhenxin Zhong
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Justin Roller
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Oleksii Bidiuk
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Jeff Blackwood
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Martin Verheijen
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Ozan Ugurlu
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124
Jason Donald
Affiliation:
Materials & Structural Analysis (formerly FEI), Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro, OR 97124

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1458 - 1459
Copyright
© Microscopy Society of America 2017 

References

[1] Schlossmacher, Peter, et al, Microscopy and Analysis Nanotechnology Supplement 2010). p. s5.Google Scholar
[2] Ugurlu, Ozan, et al, SPIE Proceedings 8681 2013). p. 868107.CrossRefGoogle Scholar