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Cleaning Treatment to Advance the Quality of FIB Samples for Transmission Electron Microscopy

Published online by Cambridge University Press:  01 August 2004

Wolfgang Gruenewald ,
Hans-Juergen Engelmann  and
Beate Volkmann
Wolfgang Gruenewald
Affiliation:
BAL-TEC Innovation Centre, Chemnitz, Germany
Hans-Juergen Engelmann
Affiliation:
AMD Saxony Manufacturing, Dresden, Germany
Beate Volkmann
Affiliation:
AMD Saxony Manufacturing, Dresden, Germany
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 10 , Issue S02 , August 2004 , pp. 1166 - 1167
Copyright
© 2004 Microscopy Society of America

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