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Combined EBL/IBL Nanopatterning on Silicon Nitride Membranes for Time-resolved Magnetic Transmission X-ray Microscopy Experiments

Published online by Cambridge University Press:  09 October 2013

M. Urbánek ,
T. Šikola ,
L. Hladík ,
T. Hrnčír  and
J. Jiruše
M. Urbánek
Affiliation:
T. Šikola
Affiliation:
L. Hladík
Affiliation:
T. Hrnčír
Affiliation:
J. Jiruše
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 872 - 873
Copyright
Copyright © Microscopy Society of America 2013