Hostname: page-component-8448b6f56d-tj2md Total loading time: 0 Render date: 2024-04-24T04:30:50.355Z Has data issue: false hasContentIssue false
  • English
  • Français

Correlative HAADF-STEM and EDX-STEM Tomography for the 3D Morphological and Elemental Analysis of FinFET Semiconductor Devices

Published online by Cambridge University Press:  01 August 2018

Julien Sorel ,
Martin Jacob ,
Toby Sanders ,
Adeline Grenier ,
Rafael Bortolin Pinheiro ,
Frederic Mazen ,
Thierry Epicier  and
Zineb Saghi
Julien Sorel
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France. Univ Lyon, INSA-Lyon, Universite C. Bernard Lyon 1, Villeurbanne Cedex, France.
Martin Jacob
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France.
Toby Sanders
Affiliation:
School of Mathematical and Statistical Sciences, Arizona State University, Tempe, AZ.
Adeline Grenier
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France.
Rafael Bortolin Pinheiro
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France.
Frederic Mazen
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France.
Thierry Epicier
Affiliation:
Univ Lyon, INSA-Lyon, Universite C. Bernard Lyon 1, Villeurbanne Cedex, France.
Zineb Saghi
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 388 - 389
Copyright
© Microscopy Society of America 2018 

References

[1] Kubel, C., et al, Microsc. Microanal. 111 2005) p. 378.Google Scholar
[2] Lepinay, K., et al, Micron 47 2013) p. 43.Google Scholar
[3] De La Pena, F., et al, Hyperspy 1, 3. ed. Zenodo.Google Scholar
[4] Sanders, T., et al, Adv. Struct. Chem. Imaging 1 2015.Google Scholar