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Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM

Published online by Cambridge University Press:  28 September 2015

Martin Oral ,
Vilém Neděla  and
Gerasimos D. Danilatos
Martin Oral
Affiliation:
Institute of Scientific Instruments, AS CR, Královopolská 147, 612 64 Brno, Czech Republic
Vilém Neděla
Affiliation:
Institute of Scientific Instruments, AS CR, Královopolská 147, 612 64 Brno, Czech Republic
Gerasimos D. Danilatos
Affiliation:
ESEM Research Laboratory, 28 Wallis Parade, North Bondi, NSW 2026, Australia

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 194 - 199
Copyright
Copyright © Microscopy Society of America 2015 

References

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