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Electron Holography with Variable Magnification for Semiconductor Device Characterization

Published online by Cambridge University Press:  01 August 2005

Y-Y Wang ,
A Domenicucci ,
M Kawasaki ,
J Bruley ,
M Gribelyuk  and
J Gaudiello
Y-Y Wang
Affiliation:
IBM, Hopewell Junction, New York
A Domenicucci
Affiliation:
IBM, Hopewell Junction, New York
M Kawasaki
Affiliation:
JEOL USA, Peabody, Massachusetts
J Bruley
Affiliation:
IBM, Hopewell Junction, New York
M Gribelyuk
Affiliation:
IBM, Hopewell Junction, New York
J Gaudiello
Affiliation:
IBM, Hopewell Junction, New York

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 564 - 565
Copyright
© 2005 Microscopy Society of America