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Enhanced Compositional Contrast in Imaging of Nanoprecipitates Buried in a Defective Crystal Using a Conventional TEM

  • Ute Kaiser (a1) and Andrey Chuvilin (a1) (a2)
Abstract

In this article, we show that nanometer-sized precipitates of atomic numbers higher than those of the surrounding crystalline matrix can be clearly revealed in a conventional transmission electron microscope by high-angle, centered dark-field imaging after minimizing the diffraction contrast. The effect is similar to that of Z-contrast STEM, albeit with a spatial resolution limited to 1 nm. Its sensitivity to atomic number differences between precipitates and matrix is about 10, which is demonstrated for precipitates formed after Er, Ge, Cr, and Si ion implantation into SiC.

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© 2003 Microscopy Society of America
Corresponding author
Corresponding author. E-mail: kaiser@pinet.uni-jena.de
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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