Skip to main content
    • Aa
    • Aa

Improved Focused Ion Beam Target Preparation of (S)TEM Specimen—A Method for Obtaining Ultrathin Lamellae

  • Lorenz Lechner (a1), Johannes Biskupek (a1) and Ute Kaiser (a1)

Specimen quality is vital to (scanning) transmission electron microscopy (TEM) investigations. In particular, thin specimens are required to obtain excellent high-resolution TEM images. Conventional focused ion beam (FIB) preparation methods cannot be employed to reliably create high quality specimens much thinner than 20 nm. We have developed a method for in situ target preparation of ultrathin TEM lamellae by FIB milling. With this method we are able to routinely obtain large area lamellae with coplanar faces, thinner than 10 nm. The resulting specimens are suitable for low kV TEM as well as scanning TEM. We have demonstrated atomic resolution by Cs-corrected high-resolution TEM at 20 kV on a FIB milled Si specimen only 4 nm thick; its amorphous layer measuring less than 1 nm in total.

Corresponding author
Corresponding author. E-mail:
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

U. Kaiser , J. Biskupek , J. Meyer , J. Leschner , L. Lechner , H. Rose , M. Stöger-Pollach , A. Khlobystov , P. Hartel , H. Müller , S. Eyhusen & G. Benner (2011). Transmission electron microscopy at 20 kV for imaging and spectroscopy. Ultramicroscopy 111, 12391246.

R. Langford & C. Clinton (2004). In situ lift-out using a FIB-SEM system. Micron 35, 607611.

J.P. McCaffrey & A. Barna (1997). Preparation of cross-sectional TEM samples for low-angle ion milling. Microsc Res Techniq 36, 362367.

H. Rose (2008). History of direct aberration correction. In Advances in Imaging and Electron Physics, vol. 153, pp. 339. New York: Elsevier.

T. Wunderer , F. Lipski , J. Hertkorn , S. Schwaiger & F. Scholz (2009). Fabrication of 3D InGaN/GaN structures providing semipolar GaN planes for efficient green light emission. Phys Status Sol C 6, S490S493.

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
Please enter your name
Please enter a valid email address
Who would you like to send this to? *



Full text views

Total number of HTML views: 7
Total number of PDF views: 23 *
Loading metrics...

Abstract views

Total abstract views: 128 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 29th May 2017. This data will be updated every 24 hours.