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Investigation of Metal-Assisted Chemical Etching for Fabrication of Silicon-Based X-Ray Zone Plates

Published online by Cambridge University Press:  10 August 2018

Rabia Akan ,
Karolis Parfeniukas ,
Carmen Vogt ,
Muhammet S. Toprak  and
Ulrich Vogt
Rabia Akan
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Karolis Parfeniukas
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Carmen Vogt
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Muhammet S. Toprak
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
Ulrich Vogt*
Affiliation:
KTH Royal Institute of Technology, Department of Applied Physics, Biomedical and X-ray Physics, Stockholm, Sweden
*
* Corresponding author, uvogt@kth.se

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S2: Proceedings of the 14th International Conference on X-ray Microscopy (XRM2018) , August 2018 , pp. 286 - 287
Copyright
© Microscopy Society of America 2018 

References

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[3] Li, K., et al, J. Vac. Sci. Technol. B 35 2017 06G901.CrossRefGoogle Scholar
[4] Parfeniukas, K., et al, Proc. SPIE 10386 2017 103860S.Google Scholar
[5] Akan, R., et al, RSC Adv. Accepted Manuscript 2018.Google Scholar