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A Method for Producing Site-Specific TEM Specimens from Low Contrast Materials with Nanometer Precision

Published online by Cambridge University Press:  04 February 2013

Henrik Pettersson ,
Samira Nik ,
Jonathan Weidow  and
Eva Olsson
Henrik Pettersson
Affiliation:
Microscopy and Microanalysis, Department of Applied Physics, Chalmers University of Technology, SE-412 96 Gothenburg, Sweden
Samira Nik
Affiliation:
Microscopy and Microanalysis, Department of Applied Physics, Chalmers University of Technology, SE-412 96 Gothenburg, Sweden
Jonathan Weidow
Affiliation:
Microscopy and Microanalysis, Department of Applied Physics, Chalmers University of Technology, SE-412 96 Gothenburg, Sweden
Eva Olsson*
Affiliation:
Microscopy and Microanalysis, Department of Applied Physics, Chalmers University of Technology, SE-412 96 Gothenburg, Sweden
*
*Corresponding author. E-mail: eva.olsson@chalmers.se
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Abstract

A method that enables high precision extraction of transmission electron microscope (TEM) specimens in low contrast materials has been developed. The main idea behind this work is to produce high contrast markers on both sides of and close to the area of interest. The markers are filled during the depositing of the protective layer. The marker material can be of either Pt or C depending on which one gives the highest contrast. It is thereby possible to distinguish the location of the area of interest during focused ion beam (FIB) milling and ensure that the TEM sample is extracted precisely at the desired position. This method is generally applicable and enables FIB/scanning electron microscope users to make high quality TEM specimens from small features and low contrast materials without a need for special holders. We explain the details of this method and illustrate its potential by examples from three different types of materials.

Keywords

specimen preparationlow-contrast materialssite-specificscanning electron microscopyfocused ion beamlift-outtransmission electron microscopy
Type
Software, Techniques and Equipment Development
Information
Microscopy and Microanalysis , Volume 19 , Issue 1 , February 2013 , pp. 73 - 78
Copyright
Copyright © Microscopy Society of America 2013

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