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THE NANOWORKBENCH: Automated Nanorobotic system inside of Scanning Electron or Focused Ion Beam Microscopes

Published online by Cambridge University Press:  25 July 2016

Ivo Burkart ,
Eva Burkart ,
Volker Klocke  and
David Peters
Ivo Burkart
Affiliation:
Klocke Nanotechnik GmbH, Aachen, Germany
Eva Burkart
Affiliation:
Klocke Nanotechnik GmbH, Aachen, Germany
Volker Klocke
Affiliation:
Klocke Nanotechnik GmbH, Aachen, Germany
David Peters
Affiliation:
Klocke Nanotechnik GmbH, Aachen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 14 - 15
Copyright
© Microscopy Society of America 2016 

References

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[5] Supported by European Commission, IST and Ziel2.NRW.Google Scholar