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New Concepts for 3D Optics in X-ray Microscopy

  • Umut Tunca Sanli (a1), Hakan Ceylan (a2), Chengge Jiao (a3), Margarita Baluktsian (a1), Corinne Grevent (a1), Kersten Hahn (a4), Yi Wang (a4), Vesna Srot (a4), Gunther Richter (a1), Iuliia Bykova (a1), Markus Weigand (a1), Metin Sitti (a2), Gisela Schütz (a1) and Kahraman Keskinbora (a1)...
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Corresponding author
* Corresponding author: keskinbora@is.mpg.de
References
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[1] Schropp, A. Schroer, C. G. Dose requirements for resolving a given feature in an object by coherent x-ray diffraction imaging. New J. Phys. 12 2010 035016.
[2] Keskinbora, K., et al. Rapid Prototyping of Fresnel Zone Plates via Direct Ga+ Ion Beam Lithography for High-Resolution X-ray Imaging. ACS Nano 7, 97889797, 2013.
[3] Sanli, U. T., et al "High-resolution high-efficiency multilayer Fresnel zone plates for soft and hard x-rays." X-Ray Nanoimaging: Instruments and Methods II. Vol. 9592 International Society for Optics and Photonics 2015.
[4] Sanli, U. T., et al "Overview of the multilayer-Fresnel zone plate and the kinoform lens development at MPI for Intelligent Systems.". EUV and X-ray Optics: Synergy between Laboratory and Space IV Vol. 9510, International Society for Optics and Photonics 2015.
[5] Keskinbora, K., et al Multilayer Fresnel zone plates for high energy radiation resolve 21 nm features at 1.2 keV. Opt. Express 22, 1844018453, 2014.
[6] Sanli, U. T., et al 3D Nanofabrication of High-resolution Multilayer Fresnel Zone Plates. Adv. Sci. (DOI: 10.1002/advs.201800346 2018.
[7] Keskinbora, K., et al Single-Step 3D Nanofabrication of Kinoform Optics via Gray-Scale Focused Ion Beam Lithography for Efficient X-Ray Focusing. Adv. Opt. Mater. 3 2015) p. 792800.
[8] Sanli, U. T., et al. 3D Nano-printed Plastic Kinoform X-ray Optics. Under Revision. (2018).
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Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
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