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Problems Concerning Application of Electron-Holography Observation of P-N Junctions from the Viewpoint of the Semiconductor Industry

Published online by Cambridge University Press:  01 August 2003

Tsukasa Hirayama ,
Zhouguang Wang ,
Takeharu Kato ,
Naoko Kato ,
Katsuhiro Sasaki  and
Hiroyasu Saka
Tsukasa Hirayama
Affiliation:
Japan Fine Ceramics Center (JFCC), Nagoya, 456-8587, Japan
Zhouguang Wang
Affiliation:
Japan Fine Ceramics Center (JFCC), Nagoya, 456-8587, Japan
Takeharu Kato
Affiliation:
Japan Fine Ceramics Center (JFCC), Nagoya, 456-8587, Japan
Naoko Kato
Affiliation:
ITES, IBM Japan, Yasu, Shiga-ken, Japan
Katsuhiro Sasaki
Affiliation:
Department of Quantum Engineering, Nagoya University, Nagoya 464-8603, Japan
Hiroyasu Saka
Affiliation:
Department of Quantum Engineering, Nagoya University, Nagoya 464-8603, Japan

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 770 - 771
Copyright
Copyright © Microscopy Society of America 2003