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Reconstruction of Laser-Induced Surface Topography from Electron Backscatter Diffraction Patterns

Published online by Cambridge University Press:  08 August 2017

Patrick G. Callahan ,
McLean P. Echlin ,
Tresa M. Pollock  and
Marc De Graef
Patrick G. Callahan*
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, CA93106-5050USA
McLean P. Echlin
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, CA93106-5050USA
Tresa M. Pollock
Affiliation:
Materials Department, University of California Santa Barbara, Santa Barbara, CA93106-5050USA
Marc De Graef
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA15213-3890, USA
*
*Corresponding author. pcallahan@engineering.ucsb.edu
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Abstract

We demonstrate that the surface topography of a sample can be reconstructed from electron backscatter diffraction (EBSD) patterns collected with a commercial EBSD system. This technique combines the location of the maximum background intensity with a correction from Monte Carlo simulations to determine the local surface normals at each point in an EBSD scan. A surface height map is then reconstructed from the local surface normals. In this study, a Ni sample was machined with a femtosecond laser, which causes the formation of a laser-induced periodic surface structure (LIPSS). The topography of the LIPSS was analyzed using atomic force microscopy (AFM) and reconstructions from EBSD patterns collected at 5 and 20 kV. The LIPSS consisted of a combination of low frequency waviness due to curtaining and high frequency ridges. The morphology of the reconstructed low frequency waviness and high frequency ridges matched the AFM data. The reconstruction technique does not require any modification to existing EBSD systems and so can be particularly useful for measuring topography and its evolution during in situ experiments.

Keywords

EBSD, Monte Carlo simulationsurface reconstructionsurface topographyfemtosecond laser
Type
Materials Science Applications
Information
Microscopy and Microanalysis , Volume 23 , Issue 4 , August 2017 , pp. 730 - 740
Copyright
© Microscopy Society of America 2017 

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