Skip to main content
×
Home
    • Aa
    • Aa

Review of Atom Probe FIB-Based Specimen Preparation Methods

  • Michael K. Miller (a1), Kaye F. Russell (a1), Keith Thompson (a2), Roger Alvis (a2) and David J. Larson (a2)...
Abstract

Several FIB-based methods that have been developed to fabricate needle-shaped atom probe specimens from a variety of specimen geometries, and site-specific regions are reviewed. These methods have enabled electronic device structures to be characterized. The atom probe may be used to quantify the level and range of gallium implantation and has demonstrated that the use of low accelerating voltages during the final stages of milling can dramatically reduce the extent of gallium implantation.

Copyright
Corresponding author
Corresponding author. E-mail: millermk@ornl.gov
Linked references
Hide All

This list contains references from the content that can be linked to their source. For a full set of references and notes please see the PDF or HTML where available.

Cairney, J.M., Saxey, D.W., McGrouther, D. & Ringer, S.P. (2007). Grain boundary investigations using atom probe tomography. Physica B 394, 267269; [doi:10.1016/j.physb.2006.12.024].

Colijn, H.O., Kelly, T.F., Ulfig, R.M. & Buchheit, R.G. (2004). Site-specific FIB preparation of atom probe samples. Microsc Microanal 10(Suppl. 2), 1150CD.

Giannuzzi, L.A., Anzalone, P.A., Young, R.J. & Phifer, D.W. (2006). Circumferential FIB milling for lift-out specimens. Microsc Microanal 12, 1310CD.

Giannuzzi, L.A., Drown, J.L., Brown, S.R., Irwin, R.B. & Stevie, F.A. (1998). Applications of the FIB lift-out technique for TEM specimen preparation. Microsc Res Technol 41, 285290.

Giannuzzi, L.A. & Stevie, F.A. (1999). A review of focused ion beam milling techniques for TEM specimen preparation. Micron 30, 197204.

Kelly, T.F. & Larson, D.J. (2000). Local-electrode atom probes. Mat Char 44, 5985.

Kempshall, B.W., Giannuzzi, L.A., Prenitzer, B.I., Stevie, F.A. & Da, S.X. (2002). Comparative evaluation of protective coatings and focused ion beam chemical vapor deposition processes. J Vac Sci Technol B 20, 286290.

Larson, D.J., Foord, D.T., Petford-Long, A.K., Anthony, T.C., Rozdilsky, I.M., Cerezo, A. & Smith, G.D.W. (1998). Focused ion-beam milling for field-ion specimen preparation: Preliminary experiments. Ultramicroscopy 75, 147159.

Larson, D.J., Foord, D.T., Petford-Long, A.K., Liew, H., Blamire, M.G., Cerezo, A. & Smith, G.D.W. (1999a). Field-ion specimen preparation using focused ion-beam milling. Ultramicroscopy 79, 287293.

Larson, D.J., Russell, K.F. & Cerezo, A. (2000). Positioning of features of interest in field-ion specimens using ion-beam milling. J Vac Sci Tech 18, 328333.

Lawrence, D., Thompson, K. & Larson, D.J. (2006). Site-specific specimen preparation technique for atom probe analysis of grain boundaries. Microsc Microanal 12, 1740CD.

Miller, M.K., Liu, C.T., Wright, J.A., Tang, W. & Hildal, K. (2006). APT characterization of some iron-based bulk metallic glasses. Intermetallics 14, 10191026.

Miller, M.K. & Russell, K.F. (2006). FIB-based atom probe specimen preparation of powders. Microsc Microanal 12, 1294CD.

Miller, M.K. & Russell, K.F. (2007). Atom probe specimen preparation with a dual beam SEM/FIB miller. Ultramicroscopy 107, 761766; [doi:10.1016/j.ultramicrosopy.2007.02.023].

Miller, M.K., Russell, K.F. & Thompson, G.B. (2005). Strategies for fabricating atom probe specimens with a dual beam FIB. Ultramicroscopy 102, 287298.

Saxey, D.W., Cairney, J.M., McGrouther, D., Honma, T. & Ringer, S.P. (2007). Atom probe specimen fabrication methods using a dual FIB/SEM. Ultramicroscopy 107, 756760; [doi:10.1016/j.ultramicrosopy.2007.02.024].

Thompson, G.B., Fraser, H.L. & Miller, M.K. (2004). Some aspects of atom probe specimen preparation and analysis of thin film materials. Ultramicroscopy 100, 2534.

Thompson, K., Gorman, B., Larson, D. J., Van Leer, B. & Hong, L. (2006). Minimization of Ga induced FIB damage using low energy clean-up. Microsc Microanal 12, 1740CD.

Thompson, K., Lawrence, D., Larson, D.J., Olson, J.D., Kelly, T.F. & Gorman, B. (2007). In situ site-specific specimen preparation for atom probe tomography. Ultramicroscopy 107, 131139.

Uchic, M.D., Wheeler, R., Seekely, M.J. & Dimiduk, D.M. (2004). Fabrication and characterization of micron-sized compression samples using a focused ion beam microscope. Microsc Microanal 10, 1126–1127CD.

Vasile, M.J., Grigg, D., Griffith, J.E., Fitzgerald, E. & Russell, P.E. (1991). Scanning probe tip geometry optimized for metrology by focused-ion beam milling. J Vac Sci Tech B 9, 35693572.

Recommend this journal

Email your librarian or administrator to recommend adding this journal to your organisation's collection.

Microscopy and Microanalysis
  • ISSN: 1431-9276
  • EISSN: 1435-8115
  • URL: /core/journals/microscopy-and-microanalysis
Please enter your name
Please enter a valid email address
Who would you like to send this to? *
×

Keywords:

Metrics

Full text views

Total number of HTML views: 18
Total number of PDF views: 186 *
Loading metrics...

Abstract views

Total abstract views: 504 *
Loading metrics...

* Views captured on Cambridge Core between September 2016 - 29th March 2017. This data will be updated every 24 hours.